| 流体环境中静电微悬臂梁的多场耦合仿真分 |
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| 引用本文： | 林谢昭,应济,陈子辰. 流体环境中静电微悬臂梁的多场耦合仿真分[J]. 农业机械学报, 2009, 40(3): 203-207 |
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| 作者姓名： | 林谢昭 应济 陈子辰 |
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| 作者单位： | 1. 浙江大学机械与能源工程学院,杭州,310027;福州大学机械工程及自动化学院,福州,350002
2. 浙江大学机械与能源工程学院,杭州,310027 |
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| 基金项目： | 国家自然科学基金，浙江省自然科学基金重点项目，福建省教育厅资助项目 |
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| 摘 要： | 微器件动力学特性通常受到周围粘性流体阻尼的强烈影响,在器件优化设计中,需要建立静电-结构-流体三场耦合模型才能细致考虑这些影响.为研究微开关在粘性流体介质中的动/静态特性和流体阻尼,建立以Navier-Stokes方程描述流体特性的静电微开关模型并进行数值分析;与相关文献结果比较验证了计算的正确性;得到了空气和去离子水介质中微开关的静/动态闭合电压、不同阶跃电压驱动下的闭合特性和流体阻尼力分布的情况.分析认为,微开关动/静态闭合电压的差异在介质粘性较大环境中较小,而在介质粘性较小环境中较大.
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| 关 键 词： | 静电致动器 流固耦合 数值仿真 微机电系统 |
-physics Analysis of an Electrostatically Actuated Microcantilever in Viscous Fluids |
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| Lin Xiezhao,Ying Ji,Chen Zichen. -physics Analysis of an Electrostatically Actuated Microcantilever in Viscous Fluids[J]. Transactions of the Chinese Society for Agricultural Machinery, 2009, 40(3): 203-207 |
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| Authors: | Lin Xiezhao Ying Ji Chen Zichen |
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| Affiliation: | 1.College of Mechanical and Energy Engineering;Zhejiang University;Hangzhou 310027;China 2.College of Mechanical Engineering and Automation;Fuzhou University;Fuzhou 350002;China |
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| Abstract: | The dymamical behavior of MEMS devices is strongly affected by viscous fluid damping effects from the surrounding.These damping effects have to be carefully considered for the design and optimization.For predicting the hydrodynamic loading of an electrostatical device in viscous fluids,it is necessary to build an electrostatic-mechanical-fluidic coupled model,where the flows characteristics were described by Navier-Stokes equations.Comprehensive analyses of the static/dynamic closing behaviors of the micros... |
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| Keywords: | Electrostatical actuator Fluidics structure interaction Computer simulation Microelectromechanical devices |
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