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Structure design and fabrication for resonant accelerometer based on electrostatic stiffness
Authors:LIU Heng  ZHANG Feng-tian  HE Xiao-ping  SU Wei and ZHANG Fu-tang
Institution:College of Communication Engineering,Chongqing University, Chongqing 400044,P.R. China;Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900,Sichuan, P.R.China;Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900,Sichuan, P.R.China;Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900,Sichuan, P.R.China;Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900,Sichuan, P.R.China;College of Communication Engineering,Chongqing University, Chongqing 400044,P.R. China;Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900,Sichuan, P.R.China
Abstract:
Keywords:micro-accelerometer  electrostatic stiffness  mode analysis  sensitivity
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