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| 磁控溅射法制备耐冲蚀钛合金复合涂层研究进展 | |
| 引用本文： | 张燕梁,戈超,张俊秋,贾凡,马荣峰.磁控溅射法制备耐冲蚀钛合金复合涂层研究进展[J].黑龙江八一农垦大学学报,2012,24(2):16-19,26. |
| 作者姓名： | 张燕梁 戈超 张俊秋 贾凡 马荣峰 |
| 作者单位： | 1. 黑龙江八一农垦大学工程学院,大庆,163319 2. 吉林大学工程仿生教育部重点实验室 3. 长春理工大学图书馆 |
| 基金项目： | 国家自然科学基金重点项目，国家973计划前期研究专项，吉林大学研究生创新基金资助项目 |
| 摘 要： | 介绍了磁控溅射的基本原理,以及几种典型的磁控溅射镀膜技术(反应溅射、非平衡磁控溅射、等离子体加强磁控溅射技术);并介绍了利用磁控溅射技术制备钛合金耐冲蚀涂层的新进展。 |
| 关 键 词： | 磁控溅射 耐冲蚀 钛合金 |
Recent Studies on Erosion Resistance Titanium Alloy Composite Coatings by Magnetron Sputtering Method |
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| Zhang Yanliang,Ge Chao,Zhang Junqiu,Jia Fan,Ma Rongfeng.Recent Studies on Erosion Resistance Titanium Alloy Composite Coatings by Magnetron Sputtering Method[J].Journal of Heilongjiang August First Land Reclamation University,2012,24(2):16-19,26. | |
| Authors: | Zhang Yanliang Ge Chao Zhang Junqiu Jia Fan Ma Rongfeng |
| Institution: | 1.College of Engineering,Heilongjiang Bayi Agricultural University,Daqing 163319; 2.Key Laboratory for Bionics Engineering of Ministry of Education Jilin University; 3.Changchun University of Science and Technology Library) |
| Abstract: | In this paper,the basic concept of magnetron sputtering method was reviewed and several typical magnetron sputtering technology such as reactive magnetron sputtering,unbalanced magnetron sputtering and plasma enhanced magnetron sputtering was described.Recent progress in research on erosion resistance titanium alloy composite coatings deposited by magnetron sputtering method was summarized. |
| Keywords: | magnetron sputter erosion resistance titanium alloy |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |