基于模态叠加法的静电微泵吸合现象

利用数值计算和模态叠加法建立了静电致动泵膜的降阶模型,使复杂的吸合过程求解简单化。通过与已有文献中的结果和三维有限元计算值的比较,表明降阶模型能减少求解时间并且具有很高的精度。利用降阶模型参数化研究了残余应力、泵膜厚度、泵膜半径、极板初始间隙对泵膜吸合电压和吸合位置的影响,得到了泵膜设计的准则,为静电微泵的优化设计提供理论基础。

Electrostatic Micropump Pull in Phenomena Based on Mode Superposition Method

Electrostatically actuated circular diaphragm exhibits an instability known as pull-in phenomena, short circuit caused by pull-in with contact is destructive to electrostatic micropump operation. In order to avoid pull-in instability caused by high driving voltage, pull-in voltage should be calculated accurately. Therefore a reduced order model (ROM) based on numerical calculation and mode superposition method was constructed, which could take account of residual stress and geometric nonlinearity. The pull-in voltage and pull-in position computed by ROM have been compared with the existed results and the results calculated by 3-D finite element analysis. It showed that the ROM sped up computational process without sacrificing the accuracy. The effects of different parameters such as residual stress, initial gap, diaphragm radius, diaphragm thickness on pull-in voltage and pull-in position were also investigated by the ROM. In addition, the design criteria of pump diaphragm were obtained, which provided an effective theoretical basis for the optimization design of electrostatic micropump.