| 微电子机械技术的发展研究 |
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| 引用本文： | 金本忠.微电子机械技术的发展研究[J].湖南农机,2013(6):91-92. |
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| 作者姓名： | 金本忠 |
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| 作者单位： | 高邮中等专业学校,江苏高邮225600 |
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| 摘 要： | 文章将重点介绍微电子机械技术的发展与现状,分析和探讨这一新机械技术的影响和意义,并总结出微电子机械技术发展所面临的的问题,并提出相应的策略和解决办法,从而为微电子机械技术的发展作出铺垫。
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| 关 键 词： | 微电子微 电子机械技术 发展与现状 |
MEMS technology development research |
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| JIN Ben-zhong.MEMS technology development research[J].Hunnan Agricultural Machinery,2013(6):91-92. |
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| Authors: | JIN Ben-zhong |
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| Institution: | JIN Ben-zhong (Gaoyou Specialized Secondary Schools, Gaoyou, Jiangsu 225600,China) |
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| Abstract: | This paper will focus on MEMS technology development and status, analyze and discuss the impact of this new machine technology and significance, and summed MEMS technology issues facing the development and propose ap- propriate strategies and solutions , so as to make the development of MEMS technology .paving the way .. |
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| Keywords: | Microelectronics MEMS technology Development and Status |
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