Ultra-low thermal conductivity in W/Al2O3 nanolaminates |
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Authors: | Costescu R M Cahill D G Fabreguette F H Sechrist Z A George S M |
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Affiliation: | Department of Materials Science and Engineering and Frederick Seitz Materials Research Laboratory, University of Illinois, Urbana, IL 61801, USA. |
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Abstract: | Atomic layer deposition and magnetron sputter deposition were used to synthesize thin-film multilayers of W/Al(2)O(3). With individual layers only a few nanometers thick, the high interface density produced a strong impediment to heat transfer, giving rise to a thermal conductivity of approximately 0.6 watts per meter per kelvin. This result suggests that high densities of interfaces between dissimilar materials may provide a route for the production of thermal barriers with ultra-low thermal conductivity. |
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