| TNE EXPERIMBNT RESEARCH OF PT THIN FILM USED IN INFRARED DETECTOR |
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| 作者姓名： | Sun Xiaosong Sun Xiaonan |
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| 作者单位： | Sun Xiaosong;Sun Xiaonan(Chongqing University)(Chongqing Jianzhu University ) |
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| 摘 要： | The preparation technology and thermal treatment PT thin film used in infrareddetector and photo-electron devices are studied. The er thin film prepared by multi-ion-beam reac-tive co-sputtering apparams are analysised by x-ray , XPS and EPMA. The impurity of PbO,Pb2Ti2O6 in PT thin film is eleminated and PbTiO3 (001)preferred orientation is improved. The rea-sonable teperature of substrates is given in this paper.
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| 关 键 词： | PT thin fillm infrared detecor.XPS |
TNE EXPERIMBNT RESEARCH OF PT THIN FILM USED IN INFRARED DETECTOR |
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| Sun Xiaosong,Sun Xiaonan.TNE EXPERIMBNT RESEARCH OF PT THIN FILM USED IN INFRARED DETECTOR[J].Storage & Process,1994(3). |
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| Authors: | Sun Xiaosong Sun Xiaonan |
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| Institution: | Sun Xiaosong;Sun Xiaonan(Chongqing University)(Chongqing Jianzhu University ) |
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| Abstract: | The preparation technology and thermal treatment PT thin film used in infrareddetector and photo-electron devices are studied. The er thin film prepared by multi-ion-beam reac-tive co-sputtering apparams are analysised by x-ray , XPS and EPMA. The impurity of PbO,Pb2Ti2O6 in PT thin film is eleminated and PbTiO3 (001)preferred orientation is improved. The rea-sonable teperature of substrates is given in this paper. |
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| Keywords: | PT thin fillm infrared detecor XPS |
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