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三维阵列式测量技术
引用本文:李崇香,李静,张臣发,刘艳霞,田野,马艳丽.三维阵列式测量技术[J].河北北方学院学报(自然科学版),2009,25(3):14-18.
作者姓名:李崇香  李静  张臣发  刘艳霞  田野  马艳丽
作者单位:1. 河北北方学院理学院,河北,张家口,075000
2. 河北北方学院医学技术学院,河北,张家口,075000
基金项目:教育部留学回国人员科研启动基金,张家口市科技局项目 
摘    要:开发一种快速检测技术,以满足工业与科研上快速检测的需求.基于光学共聚焦技术,提出了一个新颖的三维轮廓测量技术,分析其性能,并描述系统配置.分析证实了其可行性,该技术可满足当前的高分辨率和快速三维轮廓测量的需求.

关 键 词:三维轮廓测量  传感器阵列  共聚焦技术  横向分辨率  通道串扰

Three Dimensional Array Profiling Technique
LI Chong-xiang,LI Jing,ZHANG Chen-fa,LIU Yan-xia,TIAN Ye,MA Yan-li.Three Dimensional Array Profiling Technique[J].Journa of Hebei North University:Natural Science Edition,2009,25(3):14-18.
Authors:LI Chong-xiang  LI Jing  ZHANG Chen-fa  LIU Yan-xia  TIAN Ye  MA Yan-li
Abstract:To develop a rapid profiling inspection technique to satisfy the requirement of industrial fast inspection and research application, based on optical confocal technique, a novel three-dimensional topography measurement technique is proposed, its properties is analyzed, and the system configuration is described. The analysis confirms that its feasibility and this technique can meet the current demand of high resolution and fast three-dimensional profile measurement.
Keywords:three-dimensional profile measurement  sensor array  confocal technique  lateral resolution  cross-talk
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