| Abstract: | This paper proposed a novel parallel piezoelectric four-axis force/torque sensor based on the bottleneck contradictions of elastic style multi-axis wrist force sensor, It introduces the sensor's structure and operating principle and discussed the selection and spatial layout of piezoelectric quartz wafer group.Then it derives the mathematic model of the sensor. The finite element model of the sensor is established, and the prototype of the sensor is manufactured. Finally, it obtains the input and output curve, voltage sensitivity, charge sensitivity and the coupling interference.The results indicate that the sensor has advantages of simple and rational structure, correct mathematic model, nice manufacturability, good linearity, good rigidity, and natural frequency greater than 30 kHz, less than 3% of the interference error without decoupling matrix.These can meet the requirements of sensor design. |
