Mesoporous silicates prepared using preorganized templates in supercritical fluids |
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Authors: | Pai Rajaram A Humayun Raashina Schulberg Michelle T Sengupta Archita Sun Jia-Ning Watkins James J |
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Affiliation: | Department of Chemical Engineering, University of Massachusetts, Amherst, MA 01003, USA. |
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Abstract: | Well-ordered mesoporous silicate films were prepared by infusion and selective condensation of silicon alkoxides within microphase-separated block copolymer templates dilated with supercritical carbon dioxide. Confinement of metal oxide deposition to specific subdomains of the preorganized template yields high-fidelity, three-dimensional replication of the copolymer morphology, enabling the preparation of structures with multiscale order in a process that closely resembles biomineralization. Ordered mesoporous silicate films were synthesized with dielectric constants as low as 1.8 and excellent mechanical properties. The films survive the chemical-mechanical polishing step required for device manufacturing. |
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