Analysis on Internal Stress in Polycrystalline Diamond Films Measured by Raman Spectroscopy

The divagation of the internal stress in diamond films is analyzed .It's found that due to the unknown directions of the stress and crystallographic axes , the proportional parameter to express the relationship between the stress and the shift of Raman spectrum is hard to obtain precisely , resulting in the divagation of the internal stresses which are calculated from the shift of Raman spectrum.