Robust Control System for the Optical Extra-precise Vibration Isolation System

The robust control theory is used to solve the uncertainty of the optical extra-precise vibration isolation system. The wavelet theory is used to analyze the random vibration signal in the time-frequency domain and get the low frequency signal from the random vibration signal. The robust controller designed by the robust control theory is used to restrain the low frequency vibration. The active vibration isolation exploits the theory of robust control, which overcomes the uncertainty of model and the disturbance, and makes the control system to restrain the uncertainty of the model and the disturbance of the vibration. The simulation results prove that this method has shown good robustness and control precision in the vibration isolation of the optical extra-precise instrument and have good performance on restraining the low frequency vibration.