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采用误差修正是提高两相非等节距时栅位移传感器精度的有效方法.首先,详细研究了两相非等节距时栅传感器的原理和误差组成,分析了长周期误差、短周期误差等误差特性.其次,提出了一种新型的谐波误差修正方法,它可以同时消除长周期误差和短周期误差,且不要求等间距采样,采样点数少,数据处理简单.最后.,通过实验表明,该方法能大大提高传感器的精度.Abstract: Error correction is an effective way to improve the accuracy of two-phase unequal-pitch time-grating displacement sensors.This paper introduces the principle of the two-phase unequal-pitch time-grat-ing displacement sensor and the composition of its errors and analyzes the features of long-period errors and short-period errors.Based on such analyses, a new harmonic error correcting method is proposed, which can simultaneously eliminate long-period errors and short-period errors and does not require equidis-tant sampling.Compared with the traditional harmonic error correcting methods, this method is character-ized by few sample points and simple data processing.Applied in an experiment, this method was shown to be able to enhance the accuracy of the sensor greatly. 相似文献
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