| 飞秒激光微加工中热熔化与热传递现象研究 |
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| 引用本文： | 苗恩铭,陈甦欣,牛鹏程,颜焱,费业泰.飞秒激光微加工中热熔化与热传递现象研究[J].农业机械学报,2011,42(4):224-228. |
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| 作者姓名： | 苗恩铭 陈甦欣 牛鹏程 颜焱 费业泰 |
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| 作者单位： | 1. 合肥工业大学仪器科学与光电工程学院,合肥,230009
2. 合肥工业大学机械与汽车工程学院,合肥,230009 |
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| 基金项目： | 国家自然科学基金资助项目（50475069);国家科技重大专项基金资助项目（2009ZX04014—23）;西安交通大学机械制造系统工程国家重点实验室开放基金资助项目（2010006） |
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| 摘 要： | 对飞秒激光能量密度为0.108~28.68J/cm2范围内加工的硅孔表面形貌尺寸进行分析，同时对热传递现象进行研究。理论分析了飞秒激光加工区域热传导时间及温度分布，并将其与实验测量值进行对比，验证了热影响的存在。通过理论与实验分析说明了在高能量飞秒激光加工中热传递现象不可避免，并获得了较好的孔加工质量的激光能量合理参数。
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| 关 键 词： | 飞秒激光 熔化 热传递 激光能量密度 |
Thermal Diffusion and Thermal Melting in Femtosecond Laser Micromachining |
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| Miao Enming,Chen Suxin,Niu Pengcheng,Yan Yan and Fei Yetai.Thermal Diffusion and Thermal Melting in Femtosecond Laser Micromachining[J].Transactions of the Chinese Society of Agricultural Machinery,2011,42(4):224-228. |
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| Authors: | Miao Enming Chen Suxin Niu Pengcheng Yan Yan and Fei Yetai |
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| Institution: | Hefei University of Technology;Hefei University of Technology;Hefei University of Technology;Hefei University of Technology;Hefei University of Technology |
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| Abstract: | Diameters of morphology zones of crater processed by femtosecond laser were measured in the range of laser fluence from 0.108J/cm2 to 28.68J/cm2. Thermal melting on the surface of a hole and the heat conduction rule were studied. The melting zones were calculated according to the traditional thermal conduction formula. The calculated results matched with the experiment results very well. It suggested that the thermal diffusion in super power femtosecond laser micromachining was inevitable. Besides, reasonable parameters were acquired for the better quality of the micro-holes. |
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| Keywords: | Femtosecond laser Melting Heat conduction Laser fluence |
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