| 喷淋式MOCVD反应器的传质分析及结构设计 |
| |
| 引用本文： | 李晖.喷淋式MOCVD反应器的传质分析及结构设计[J].厦门水产学院学报,2011(3):212-217. |
| |
| 作者姓名： | 李晖 |
| |
| 作者单位： | [1]集美大学机械工程学院,福建厦门361021 [2]江苏大学能源与动力工程学院,江苏镇江212013 |
| |
| 基金项目： | 福建省科技计划重点项目（2009H2006） |
| |
| 摘 要： | 对喷淋式MOCVD反应器中的传质过程进行了数理分析,并提出了该类型反应器的结构设计原则.数理分析显示,基片上方各点的轴向速度仅是垂直距离的函数,与径向距离无关;顶壁高度对反应室内的传质有重要影响.设计喷淋式反应器结构时,应重点考虑顶壁高度和反应室半径的选取、基片加热方式以及喷淋头结构的柔性设计.
|
| 关 键 词： | 喷淋式MOCVD反应器 传质 数理分析 结构设计 |
Mass Transport Analysis and Structure Design of Showerhead MOCVD Reactor |
| |
| Authors: | LI Hui |
| |
| Institution: | LI Hui,(1.School of Mechanical Engineering,Jimei University,Xiamen 361021,China;2.School of Energy and Power Engineering,Jiangsu University,Zhenjiang 212013,China) |
| |
| Abstract: | The mass transport process in showerhead MOCVD reactor was mathematically analyzed,and the design principles of the reactor were suggested.The mathematical analysis showed that,the vertical component velocity of a point over the substrate was only dependent of vertical distance and independent of radial distance.The ceiling height of the reactor had important effects on the mass transport process.When designing a MOCVD showerhead reactor,more attention should be paid to ceiling height,chamber radius,heating method of the substrate and flexibility of showerhead structure. |
| |
| Keywords: | showerhead MOCVD reactor mass transport mathematical analysis structure design |
| 本文献已被 维普 等数据库收录！ |
|
