| 基于双悬臂梁结构的光纤加速度传感器 |
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| 作者姓名： | 侯跃峰 路智敏 张文涛 李芳 |
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| 作者单位： | 内蒙古工业大学化工学院;中国科学院半导体研究所光电系统实验室,内蒙古工业大学化工学院,中国科学院半导体研究所光电系统实验室,中国科学院半导体研究所光电系统实验室 |
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| 基金项目： | 国家自然科学基金(41074128,61077059);北京市科技新星计划(2010B055)资助项目 |
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| 摘 要： | 为消除悬臂梁结构加速度传感器由于光纤表面粘贴产生的啁啾现象,增强横向抗干扰能力,提高共振频率,提出了一种基于双悬臂梁结构的光纤加速度传感器。给出了理论分析结果,建立了有限元模型,得到了加速度灵敏度表达式,并且探讨了在共振频率不变的情况下提高加速度灵敏度的方法。实验结果表明,该传感器在6～50 Hz内频响平坦,加速度灵敏度为14pm/g,抗横向干扰能力达20dB,与理论计算较好地吻合。
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| 关 键 词： | 光纤传感 悬臂梁 光纤激光器 加速度 传感器 有限元分析(FEA) |
Fiber accelerometer based on double-cantilever structure |
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| Authors: | HOU Yue-feng LU Zhi-min ZHANG Wen-tao and LI Fang |
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| Institution: | College of Chemical Engineering,Inner Mongolia University of Technology,Hohhot 010051,China;Optoelectronic System Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China,College of Chemical Engineering,Inner Mongolia University of Technology,Hohhot 010051,China,Optoelectronic System Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China and Optoelectronic System Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China |
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| Abstract: | A novel fiber accelerometer based on double-cantilever structure is presented in this paper.The accelerometer can eliminate the chirp effects casued by glue,reduce the transverse response and increase the natural frequency.Theoretical analysis is given and the finite element method is used.A method to enhance the sensitivity without reducing the resonant frequency is also proposed.The experimental results show a flat frequency response from 6 Hz to 50 Hz,a sensitivity of 14 pm/g and a directivity of better than 20 dB,which agree well with the theoretical analysis. |
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| Keywords: | fiber sensing cantilever beam fiber laser acceleration sensor finite element analysis(FEA) |
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