Machine Vision Aided Testing System for Flatness Based on Equal Inclination Interference Theory

An approach is described on the automated tracking of interference circle fringe to get the flatness accurately based on the Equal Inclination Interference Theory (EIIT). The system,based on the theory of EIIT, can be applied to grasp the changing fringe information, which is white alternating with black through the CCD camera. Following the basic principle of fringes image centro-symmetric, we create some windows, process only the interference fringes information in the windows. According to the position of the processed interference fringe and the position of the last adjacent interference fringe in the windows, the interference fringe variation value N from the starting measured point is received, it implies the changed altitude value from the starting measurement point. This method allows us not only get the fringe information of the half-wavelength integer multiple but also denote those of the half-wavelength decimal multiple. The system is proved to be effective experimentally. It is useful in metrology department for the high-precision flatness standard unit.

Machine Vision Aided Testing System for Flatness Based on Equal Inclination Interference Theory

An approach is described on the automated tracking of interference circle fringe to get the flatness accurately based on the Equal Inclination Interference Theory (EIIT). The system,based on the theory of EIIT, can be applied to grasp the changing fringe information, which is white alternating with black through the CCD camera. Following the basic principle of fringes image centro-symmetric, we create some windows, process only the interference fringes information in the windows. According to the position of the processed interference fringe and the position of the last adjacent interference fringe in the windows, the interference fringe variation value N from the starting measured point is received, it implies the changed altitude value from the starting measurement point. This method allows us not only get the fringe information of the half-wavelength integer multiple but also denote those of the half-wavelength decimal multiple. The system is proved to be effective experimentally. It is useful in metrology department for the high-precision flatness standard unit.