| Nanometer Scale Surface Roughness Measurement Based on AFM |
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| 引用本文： | HAN Xian-wu,CHEN Xiao-an,YANG Xue-heng,BAI Hai-hui. Nanometer Scale Surface Roughness Measurement Based on AFM[J]. 保鲜与加工, 2007, 0(2): 5-8 |
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| 作者姓名： | HAN Xian-wu CHEN Xiao-an YANG Xue-heng BAI Hai-hui |
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| 作者单位： | 1. State Key Laboratory of Mechanical Transmission ; College of Mathematics and Physics, Chongqing University, Chongqing 400030, China |
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| 摘 要： | The datum line and mainly three profile height parameters of surface roughness are briefly introduced and the operation principle and system structure of AFM. IPC - 208B with high-resolution, which was successfully developed by Chongqing University, are described in detail, and the emphasis is laid on its application on the nanometer scale surface roughness. Taking stainless steel for example, its micro-structure was observed, and the surface data were analyzed and transacted by special evaluator and the values of three profile height parameters were obtained. Finally the experimental results are briefly analyzed.
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| 关 键 词： | surface roughness nanometer scale mathematical model |
| 修稿时间： | 2006-05-22 |
Nanometer Scale Surface Roughness Measurement Based on AFM |
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| HAN Xian-wu,CHEN Xiao-an,YANG Xue-heng,BAI Hai-hui. Nanometer Scale Surface Roughness Measurement Based on AFM[J]. Storage & Process, 2007, 0(2): 5-8 |
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| Authors: | HAN Xian-wu CHEN Xiao-an YANG Xue-heng BAI Hai-hui |
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| Affiliation: | 1. State Key Laboratory of Mechanical Transmission ; College of Mathematics and Physics, Chongqing University, Chongqing 400030, China |
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| Abstract: | The datum line and mainly three profile height parameters of surface roughness are briefly introduced and the operation principle and system structure of AFM. IPC - 208B with high-resolution, which was successfully developed by Chongqing University, are described in detail, and the emphasis is laid on its application on the nanometer scale surface roughness. Taking stainless steel for example, its micro-structure was observed, and the surface data were analyzed and transacted by special evaluator and the values of three profile height parameters were obtained. Finally the experimental results are briefly analyzed. |
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| Keywords: | surface roughness nanometer scale mathematical model |
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