Removal of static electricity on polyimide film surface by O2 or Ar cold plasma etching |
| |
Authors: | Lee Jae Ho Jeong Hee Cheon |
| |
Affiliation: | (1) Department of Textile Engineering, Miryang National University, 627-702 Miryang, Korea;(2) School of Textiles, Yeungnam University, 712-749 Gyeongsan, Korea |
| |
Abstract: | Cold plasma of O2 or Ar was irradiated on hydrophobic Kapton surface to attenuate or remove the electrostatic potential. A measurement on charge dissipation speed clarifies the obscure effect of plasma. These consequences reveal that O2 plasma etching is more effective than Ar plasma. After 30 days, the dissipation speed of accumulated charge on initially etched sample has not changed under summar season. |
| |
Keywords: | Kapton O2 plasma Ar plasma Charge dissipation speed |
本文献已被 SpringerLink 等数据库收录! |