| Analysis on Micro-structure of TiN Thin Film and Polyimide with AFM |
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| 作者姓名： | BAI Hai-hui YANG Xue-heng PENG Guang-han |
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| 作者单位： | 1. College of Mathematics and Physics, Chongqing 400030 China ; 2. Department of Physics and Electronic, Hunan University of Arts and Science, Changde 415000 ,China |
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| 摘 要： | The study in molecular morphology is given with a highresolution Atomic Force Microscope AFM.IPC-208B.By taking TiN thim film prepared by magnerton sputtering method and polymide(PI) fibre for examples,the preferenthal growing plme of TiN thin film,the atomic arranges of TiN thin film on the preferential growing plme and the surficial micro-structure can be ascertained form the three-dimensional images obtamed by AFM.IPC-208B.These experiments not only identify small structures of the materials,but also affirm that AFM.IPC-208B holds the precision of atomic level and potential application in micro-structure field,at the same time it establishs the groundwork for the application in micro-process kingdom.
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| 关 键 词： | AFM TiN thin film magnetron sputtering micro-structure preferential growing face |
| 收稿时间： | 2006/3/10 0:00:00 |
| 修稿时间： | 2006/3/10 0:00:00 |
Analysis on Micro-structure of TiN Thin Film and Polyimide with AFM |
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| BAI Hai-hui,YANG Xue-heng,PENG Guang-han.Analysis on Micro-structure of TiN Thin Film and Polyimide with AFM[J].Storage & Process,2006(8):138-140145. |
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| Authors: | BAI Hai-hui YANG Xue-heng PENG Guang-han |
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| Institution: | 1. College of Mathematics and Physics, Chongqing 400030 China ; 2. Department of Physics and Electronic, Hunan University of Arts and Science, Changde 415000 ,China |
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| Abstract: | The study in molecular morphology is given with a highresolution Atomic Force Microscope AFM.IPC-208B.By taking TiN thim film prepared by magnerton sputtering method and polymide(PI) fibre for examples,the preferenthal growing plme of TiN thin film,the atomic arranges of TiN thin film on the preferential growing plme and the surficial micro-structure can be ascertained form the three-dimensional images obtamed by AFM.IPC-208B.These experiments not only identify small structures of the materials,but also affirm that AFM.IPC-208B holds the precision of atomic level and potential application in micro-structure field,at the same time it establishs the groundwork for the application in micro-process kingdom. |
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| Keywords: | AFM TiN thin film magnetron sputtering micro-structure preferential growing face |
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