单振子气体压电泵研究

对单振子压电驱动微型气泵进行了结构设计,并对其主要构件单向阀进行了动力学建模与仿真分析,在此基础上制作了微型气泵样机,并进行了测试实验。设计的单振子压电气泵以中间开孔的压电双晶片为动力源,利用粘结在压电片孔上的单向阀来截止流体。泵的进、出口在压电片的两侧,以压电振子的振动动能直接驱动单向阀产生与泵腔容积变化相应的打开/关闭动作,与传统的进、出口在同侧、仅依靠单向阀两侧的压差驱动单向阀工作的压电气泵相比流阻小,且具有很好的单向截止性,并提高了气体输出流量和单向截止阀响应频率。实验证明当驱动电压为40 V、频率为1 000 Hz时,输出流量可达到720 mL/min。

Kipp Oscillator Gas Piezoelectric Pump

A kipp oscillator gas piezoelectric micro-pump was presented.The dynamic modeling and simulation of the check valve which was the main component of pump were investigated.Based the analysis results,a proto type of gas micro-pump was fabricated and measured.The pump was driven by piezoelectric bimorph which had a hole in the middle,and a check valve was adhered to the hole to cut off fluid.The inlet and outlet was located in the two sides of the piezoelectric vibrator,and the on/off action of the check valve corresponding to the variation of the pump chamber was produced by the actuation vibration energy of piezoelectric vibrator.Compared with the traditional piezoelectric pump which inlet and outlet was located in one side and the check valve was drived by differential pressure on the two sides,it had lower fluid resistance and preferable unidirectional cut off characteristic.So the gas pumping ability and the response frequency of check valve were enhanced.The measured output flow rate of present design by experiment reached to 720mL/min when driving voltage and frequency was 40V and 1000Hz.